Limiting factors for the growth rate of epitaxial III-V compound semiconductors
نویسندگان
چکیده
Limiting factors for the growth rate of epitaxial III-V compound semiconductors are investigated. A model based on two connected diffusion equations group III and V adatoms applies planar layers different nanostructures including nanowires. An expression step is obtained a physical parameter revealed which determines an element actually limits process. Keywords: semiconductors, surface adatoms, desorption, rate.
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ژورنال
عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki
سال: 2023
ISSN: ['1726-7471', '0320-0116']
DOI: https://doi.org/10.21883/tpl.2023.04.55886.19512